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Specific Process Knowledge/Back-end processing/Polisher CMP: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Rkch (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
285 edits
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|style="background:LightGrey; color:black"|Polishing liquid
|style="background:LightGrey; color:black"|Polishing liquid
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Al2O3 (alumina) powder: 3, 9 or 20 µm
*SF1 Polishing Fluid
*Chemlox (for polishing)
*SF1 Polishing Fluid (for polishing e.g. SiO2)
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|-
|style="background:LightGrey; color:black"|Polishing cloths
|style="background:LightGrey; color:black"|Polishing cloths
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Chemcloth Polishing Cloths (for use with SF1 liquid)
*Chemcloth Polishing Cloths
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|-
|style="background:LightGrey; color:black"|Rotation speed
|style="background:LightGrey; color:black"|Rotation speed
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