Specific Process Knowledge/Back-end processing/Polisher CMP: Difference between revisions
| Line 85: | Line 85: | ||
|style="background:LightGrey; color:black"|Sample size | |style="background:LightGrey; color:black"|Sample size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*<nowiki> | *<nowiki></nowiki> one 20x20mm piece | ||
*one 50 mm wafer | *one 50 mm wafer | ||
*one 2" wafer | *one 2" wafer | ||