Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
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The table below compares the hardware and the options. | The table below compares the hardware and the options. | ||
{| border="2" cellspacing="0" cellpadding="0" align=" | {| border="2" cellspacing="0" cellpadding="0" align="left" | ||
! colspan="2" style="background:silver; color:black" rowspan="2" | | ! colspan="2" style="background:silver; color:black" rowspan="2" | | ||
! style="background:silver; color:black" rowspan="2" | [[Specific Process Knowledge/Etch/ASE_(Advanced_Silicon_Etch)| ASE]] | ! style="background:silver; color:black" rowspan="2" | [[Specific Process Knowledge/Etch/ASE_(Advanced_Silicon_Etch)| ASE]] | ||