Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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== | ==Roughness of thermally evaporated aluminium== | ||
A study by AFM was performed to examine the Al films deposited with thermal evaporation. See details of the study [[/Comparison of roughness and other surface characteristics for different methods of Aluminium deposition|here]]. | A study by AFM was performed to examine the Al films deposited with thermal evaporation. See details of the study [[/Comparison of roughness and other surface characteristics for different methods of Aluminium deposition|here]]. | ||