Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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|10Å to ~0.5µm (very time consuming ) | |10Å to ~0.5µm (very time consuming ) | ||
|10Å to 0.3 µm*** (this uses all Al in the boat) | |10Å to 0.3 µm*** (this uses all Al in the boat) | ||
|10Å to | |10Å to 1 µm** | ||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||