Specific Process Knowledge/Wafer Information: Difference between revisions
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If you buy wafers that have to go directly from the new wafer box into any of the LPCVD furnaces or Furnace C1 buy the numbers of wafers you need minus one. This unlock the door, take the box to the furnace as you close the door to the cupboard behind you, load your wafers into the furnace. Then buy the last wafers for unlocking the cupboard door again such that the wafer box can be placed in the cupboard again. | If you buy wafers that have to go directly from the new wafer box into any of the LPCVD furnaces or Furnace C1 buy the numbers of wafers you need minus one. This unlock the door, take the box to the furnace as you close the door to the cupboard behind you, load your wafers into the furnace. Then buy the last wafers for unlocking the cupboard door again such that the wafer box can be placed in the cupboard again. | ||
=== Wafer boxes and single wafer carriers === | === Wafer boxes and single wafer carriers === | ||
New clean wafer boxes and single wafer carriers can be found in the gowning area. Ask DTU Nanolab personnel for help if stock is low. | New clean wafer boxes and single wafer carriers can be found in the gowning area. Ask DTU Nanolab personnel for help if stock is low. | ||