Specific Process Knowledge/Wafer Information: Difference between revisions
Appearance
| Line 23: | Line 23: | ||
|500 µm | |500 µm | ||
|1-20 Ωcm | |1-20 Ωcm | ||
|- | |- | ||
!SSP (single side polished) | !SSP (single side polished) | ||
| Line 30: | Line 29: | ||
|525 µm | |525 µm | ||
|1-20 Ωcm | |1-20 Ωcm | ||
|- | |- | ||
!SSP (single side polished) | !SSP (single side polished) | ||
|6" | |6" | ||
|N | |N | ||
|625 µm | |625 µm | ||
| | |10-20 Ωcm | ||
|- | |- | ||
!SSP (single side polished) | !SSP (single side polished) | ||
| Line 44: | Line 41: | ||
|725 µm | |725 µm | ||
|1-10 Ωcm | |1-10 Ωcm | ||
|- | |- | ||
!DSP (double side polished) | !DSP (double side polished) | ||
|4" | |4" | ||
|N or P | |N or P | ||
|350 | |350 µm | ||
|1-20 Ωcm | |1-20 Ωcm | ||
|- | |- | ||
!DSP (double side polished) | !DSP (double side polished) | ||
|4" | |4" | ||
|N | |N | ||
| | |500 µm | ||
|1-20 Ωcm | |||
|- | |||
!DSP (double side polished) | |||
|6" | |||
|N | |||
|500 µm | |||
|1-20 Ωcm | |1-20 Ωcm | ||
|- | |- | ||