Specific Process Knowledge/Wafer Information: Difference between revisions
| Line 2: | Line 2: | ||
== Wafer Information == | == Wafer Information == | ||
DTU Nanolab has a stock of silicon and glass wafers; the most used of these wafers are located in the wafer cupboard in cleanroom B-1. DTU Danchip seeks always to have new deliveries of wafers on stock. They will be available when the previous delivery has been used. | DTU Nanolab has a stock of standard silicon and glass wafers; the most used of these wafers are located in the wafer cupboard in cleanroom B-1. DTU Danchip seeks always to have new deliveries of wafers on stock. They will be available when the previous delivery has been used. | ||
=== Wafers available in DTU Nanolabs cleanroom === | |||
The standard wafers available are: | |||
{| border="1" style="text-align: center; width: 550px; height: 100px;" | |||
|colspan="6" style="text-align: center;" style="background: #efefef;" | '''Wafers available in the cleanroom''' | |||
|- | |||
!scope="row" width="15%"| | |||
!width="15%" |Size | |||
!width="15%" |Type | |||
!width="15%" |Thickness | |||
!width="15%" |Resistivity | |||
|- | |||
!SSP (single side polished) | |||
|2" | |||
|P | |||
|500 µm | |||
|1-20 Ωcm | |||
|- | |||
|- | |||
!SSP (single side polished) | |||
|4" | |||
|N+P | |||
|525 µm | |||
|1-20 Ωcm | |||
|- | |||
|- | |||
!SSP (single side polished) | |||
|6" | |||
|N or P | |||
|625 µm | |||
|1-20 Ωcm | |||
|- | |||
|- | |||
!DSP (double side polished) | |||
|4" | |||
|N+P | |||
|350 µm | |||
|1-20 Ωcm | |||
|- | |||
!Fused silica wafers | |||
|4" | |||
| | |||
|500 µm | |||
| | |||
|- | |||
!Boron glass wafers | |||
|4" | |||
| | |||
|1 mm | |||
| | |||
|- | |||
!pre-processed | |||
|4" and 6" | |||
| | |||
| | |||
| | |||
|- | |||
|} | |||
The wafer box name consists typically of a few letters and a number, eg OP337: | The wafer box name consists typically of a few letters and a number, eg OP337: | ||
| Line 19: | Line 82: | ||
|} | |} | ||
A full list of wafers is found in the wafer shop in Labmanager [http://labmanager.danchip.dtu.dk/function.php?module=Wafer&view=list&page_id=16| wafer shop]. | |||
===How to buy wafers:=== | ===How to buy wafers:=== | ||