Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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* ''TiO<sub>2</sub> is readily reduced by argon monomer sputtering'' | * ''TiO<sub>2</sub> is readily reduced by argon monomer sputtering'' | ||
** ''Sub-oxides and/or metal may be formed during sputtering of the oxide.'' | ** ''Sub-oxides and/or metal may be formed during sputtering of the oxide.'' | ||
The only challenge we are missing from this cocktail asymmetric peak shapes, differences in spin-orbit splitting, reduction of fully oxidized Ti2p to sub-oxides and satellite features is the presence of TiN. | |||