Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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*** ''Causes difficulty in accurately peak fitting Ti2p region with multiple chemical states.'''' | *** ''Causes difficulty in accurately peak fitting Ti2p region with multiple chemical states.'''' | ||
[[File:Ti ref 2.PNG|450px]] | [[File:Ti ref 2.PNG|450px]] | ||
'''General comments''' | '''General comments''' | ||
* ''Metal is readily oxidized.'' | * ''Metal is readily oxidized.'' | ||
**''Titanium is used as a getter material for oxygen.'' | **''Titanium is used as a getter material for oxygen.'' | ||
* ''TiO<sub>2</sub> is readily reduced by argon monomer sputtering'' | * ''TiO<sub>2</sub> is readily reduced by argon monomer sputtering'' | ||
** ''Sub-oxides and/or metal may be formed during sputtering of the oxide.'' | ** ''Sub-oxides and/or metal may be formed during sputtering of the oxide.'' | ||