Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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== The Ti2p peak == | == The Ti2p peak == | ||
The titanium Ti2p peak is notoriously difficult to fit. From [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview |XPS Knowledge view]] we have: | The titanium Ti2p peak is notoriously difficult to fit. From [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview |XPS Knowledge view]] we have: | ||
*'' Ti metal gives asymmetric Ti2p peak shapes'' | *'' Ti metal gives asymmetric Ti2p peak shapes'' | ||
** ''TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features.'' | ** ''TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features.'' | ||
[[File:Ti ref1.PNG]] | [[File:Ti ref1.PNG|450px]] | ||
* ''Ti2p peak has significantly split spin-orbit components (Δ<sub>metal</sub>=6.1 eV)'' | * ''Ti2p peak has significantly split spin-orbit components (Δ<sub>metal</sub>=6.1 eV)'' | ||
** ''Splitting Δ-value varies with chemical state (Δ<sub>nitride</sub>=6.0 eV,Δ<sub>oxide</sub>=5.7 eV).'' | ** ''Splitting Δ-value varies with chemical state (Δ<sub>nitride</sub>=6.0 eV,Δ<sub>oxide</sub>=5.7 eV).'' | ||
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*** ''Caused by Coster-Kronig effect. (Post-ionization, Ti2p<sub>1/2</sub> is very short lived compared to Ti2p<sub>3/2</sub> state.)'' | *** ''Caused by Coster-Kronig effect. (Post-ionization, Ti2p<sub>1/2</sub> is very short lived compared to Ti2p<sub>3/2</sub> state.)'' | ||
*** ''Causes difficulty in accurately peak fitting Ti2p region with multiple chemical states.'''' | *** ''Causes difficulty in accurately peak fitting Ti2p region with multiple chemical states.'''' | ||
[[File:Ti ref2.PNG|450px]] | |||
'''General comments''' | |||
* ''Metal is readily oxidized.'' | |||
**''Titanium is used as a getter material for oxygen.'' | |||
* ''TiO<sub>2</sub> is readily reduced by argon monomer sputtering'' | |||
** ''Sub-oxides and/or metal may be formed during sputtering of the oxide.'' | |||