Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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*'' Ti metal gives asymmetric Ti2p peak shapes'' | *'' Ti metal gives asymmetric Ti2p peak shapes'' | ||
** ''TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features.'' | |||
** TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features. | * ''Ti2p peak has significantly split spin-orbit components (Δ<sub>metal</sub>=6.1 eV)'' | ||
** ''Splitting Δ-value varies with chemical state (Δ<sub>nitride</sub>=6.0 eV,Δ<sub>oxide</sub>=5.7 eV).'' | |||
*Ti2p peak has significantly split spin-orbit components (Δ<sub>metal</sub>=6.1 eV) | ** ''Typically FWHM for each spin-orbit component is the same, but for Ti2p the Ti2p<sub>1/2</sub> component is much broader than the Ti2p<sub>3/2</sub> peak.'' | ||
*** ''Consequently, Ti2p<sub>1/2</sub> peak is much shorter than expected.'' | |||
** Splitting Δ-value varies with chemical state (Δ<sub>nitride</sub>=6.0 eV,Δ<sub>oxide</sub>=5.7 eV). | *** ''Caused by Coster-Kronig effect. (Post-ionization, Ti2p<sub>1/2</sub> is very short lived compared to Ti2p<sub>3/2</sub> state.)'' | ||
*** ''Causes difficulty in accurately peak fitting Ti2p region with multiple chemical states.'''' | |||
** Typically FWHM for each spin-orbit component is the same, but for Ti2p the Ti2p<sub>1/2</sub> component is much broader than the Ti2p<sub>3/2</sub> peak. | |||
*** Consequently, Ti2p<sub>1/2</sub> peak is much shorter than expected. | |||
*** Caused by Coster-Kronig effect. (Post-ionization, Ti2p<sub>1/2</sub> is very short lived compared to Ti2p<sub>3/2</sub> state.) | |||
*** Causes difficulty in accurately peak fitting Ti2p region with multiple chemical states.'' | |||