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Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions

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Jmli (talk | contribs)
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''* Ti metal gives asymmetric Ti2p peak shapes
*'' Ti metal gives asymmetric Ti2p peak shapes''


** TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features.
** TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features.