Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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'' | *'' Ti metal gives asymmetric Ti2p peak shapes'' | ||
** TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features. | ** TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features. | ||