Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions

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 |* Ti metal gives asymmetric Ti2p peak shapes
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 |** TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features.
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 |*Ti2p peak has significantly split spin-orbit components (Δ<sub>metal</sub>=6.1 eV)
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 |** Splitting Δ-value varies with chemical state (Δ<sub>nitride</sub>=6.0 eV,Δ<sub>oxide</sub>=5.7 eV).
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 |** Typically FWHM for each spin-orbit component is the same, but for Ti2p the Ti2p<sub>1/2</sub> component is much broader than the Ti2p<sub>3/2</sub> peak.
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 |*** Consequently, Ti2p<sub>1/2</sub> peak is much shorter than expected.
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 |*** Caused by Coster-Kronig effect. (Post-ionization, Ti2p<sub>1/2</sub> is very short lived compared to Ti2p<sub>3/2</sub> state.)
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 |*** Causes difficulty in accurately peak fitting Ti2p region with multiple chemical states.
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 |}