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Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
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[[File:ALD-Sandwich-48a.jpg|700px]]
[[File:ALD-Sandwich-48a.jpg|700px]]
The fitting is much better as seen below. One could probably argue that the presence of the Valence band peak is irrelevant as it only becomes important after etch level 9-11 where the Hf is essentially gone.
[[File:Hf4f triple peaks valence.gif]]
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