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Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions

Jmli (talk | contribs)
Jmli (talk | contribs)
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# With the entire peak table highlighted press the 'Propagate constraints and values to all levels' to the right of the table (indicated by a green square).
# With the entire peak table highlighted press the 'Propagate constraints and values to all levels' to the right of the table (indicated by a green square).


With the constraints and names applied to all etch levels, we can start the fitting routine by pressing 'Fit All Levels'. Below is gif of the fitting.
With the constraints and names applied to all etch levels, we can start the fitting routine by pressing 'Fit All Levels'. Below is a gif image of the fitting of the etch levels in which Hf can be expected to be present.


[[File:Hf4f twin peaks.gif]]
[[File:Hf4f twin peaks.gif]]
We note the following:
# The Hf4f peak is at very low binding energy, very near or even in the valence band. We can therefore expect to see contributions from other elements as well. This begins at etch level 10 or 11 where the intensity from Hf4f is low. Most notably, a peak at binding energy 23-24 eV becomes dominant beyond etch level 13. It would probably make most sense to add a peak constrained in this binding energy range and then exclude that peak from the subsequent quantifications.
#