Specific Process Knowledge/Etch: Difference between revisions
| Line 11: | Line 11: | ||
*[[/Etching of Silicon Oxide|Silicon Oxide]] | *[[/Etching of Silicon Oxide|Silicon Oxide]] | ||
*[[/Etching of Bulk Glass|Bulk Glass]] - ''Borofloat (pyrex) and fused silica (quartz)'' | *[[/Etching of Bulk Glass|Bulk Glass]] - ''Borofloat (pyrex) and fused silica (quartz)'' | ||
*[[Etching of Silicon Nitride]] | |||
== Choose a dry etch equipment == | == Choose a dry etch equipment == | ||