Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions

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The analysis is continued from [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey|'''here''']].
The analysis is continued from [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey|'''here''']].


We start with the Al2p peak. Below is shown the etch level 23. Click 'Peak Fit' and select 'Add doublet' (''Not 'Add Single Peak' ''). In the tab 'Fit Peaks' click 'Fit All Levels'.
We start with the Al2p scan. Below is shown the etch level 23. Click 'Peak Fit' and select 'Add doublet' (''Not 'Add Single Peak' ''). In the tab 'Fit Peaks' of the 'Peak Fitting' panel click 'Fit All Levels'.


[[File:ALD-Sandwich-40.jpg|700px]]
[[File:ALD-Sandwich-40.jpg|700px]]


So far we did not add any constraints at all. That means the Al2p spin orbit doublet is free to shift binding energy or FWHM.
So far we did not add any constraints at all. That means the Al2p spin orbit doublet is free to move anywhere to find a minimum error.


Scrolling through the etch levels (seen in the bottom of the image below slightly to the right) one can see that the fitting is good. There is some energy shifts but we will ignore that for now.
Scrolling through the etch levels (seen in the bottom of the image below slightly to the right) one can see that the fitting is good. There is some energy shifts but we will ignore that for now.


[[File:ALD sandwidh Al2p.gif]]
[[File:ALD sandwidh Al2p.gif]]

Revision as of 16:03, 17 October 2018

Processing of high resolution scanned spectra

The analysis is continued from here.

We start with the Al2p scan. Below is shown the etch level 23. Click 'Peak Fit' and select 'Add doublet' (Not 'Add Single Peak' ). In the tab 'Fit Peaks' of the 'Peak Fitting' panel click 'Fit All Levels'.

So far we did not add any constraints at all. That means the Al2p spin orbit doublet is free to move anywhere to find a minimum error.

Scrolling through the etch levels (seen in the bottom of the image below slightly to the right) one can see that the fitting is good. There is some energy shifts but we will ignore that for now.