Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey: Difference between revisions

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 [[File:ALD sandwich Ti survey.gif|630px]]
-In the gif file above one can see the etch level in the bottom center right. The fitting routine adds a background to the data and subtracts it from the data before the peak is fitted. This background is shown with a light green color. It is clear that something goes wrong; the fitted backrground eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.
+In the gif file above one can see the etch level in the bottom center right.
+In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.