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Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,580 edits
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[[File:ALD-Sandwich-27.jpg|700px]]
[[File:ALD-Sandwich-27.jpg|700px]]


In the profile below there is a few problems.
In the profile below there is one problem.


[[File:ALD-Sandwich-29a.jpg|700px]]
[[File:ALD-Sandwich-29a.jpg|700px]]


As seen above:
As seen above there is only a very small amount of Ti2p. Why is this? Let us zoom in onto the Ti2p peak and see how the fitting goes.
* The O1s content is some 80-90% until the layer containing Al2p is reached.
 
* The Hf4f is not there.
 
* There is only a very small amount of Ti2p.
[[File:ALD sandwich Ti survey.gif|700px]]
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