Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey: Difference between revisions

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 [[File:ALD-Sandwich-29.jpg|700px]]
-As seen above:* The O1s content is some 80-90% until the layer containing Al2p is reached.* The Hf4f is not there* There is only a very small amount of Ti2p
+As seen above:
+* The O1s content is some 80-90% until the layer containing Al2p is reached.
+* The Hf4f is not there.
+* There is only a very small amount of Ti2p.