Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1: Difference between revisions
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==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/1Open|1. Open the experiment and prepare processing grids]] ==== | ==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/1Open|1. Open the experiment and prepare processing grids]] ==== | ||
==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey|2. Survey spectra procesing]] ==== | |||
Revision as of 10:57, 16 October 2018
XPS analysis of ALD deposited layers
This section assumes that you are familiar with the basic operations of data processing in Avantage. If not, then press HERE and go through this part first.
This is an analysis of ALD deposited layers: A silicon wafer has been coated with with 15 nm Al2O3, 15 nm of TiO2 and 16 nm of HfO2.
Guidelines on data processing
Click HERE to see some general guidelines on data processing in Avantage.
How to get the data used in the example below
The wiki does not allow uploading of *.zip data files so the zipped data file has been renamed to a *.xls file. Therefore, do the following:
- Download this File:Experiment 2.xls.
- Rename the downloaded file Experiment_2.xls to Experiment_2.zip
- Extract to a folder on a local drive (right click and select 'Extract all'). Avantage will not work on network drives.