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| ==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/1Open|1. Open the experiment and prepare processing grids]] ==== | | ==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/1Open|1. Open the experiment and prepare processing grids]] ==== |
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| [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1|Depth profile of ALD layers: Silicon wafer with 15 nm Al<sub>2</sub>O<sub>3</sub>, 15 nm of TiO<sub>2</sub> and 16 nm of HfO<sub>2</sub> ]]
| | Depth profile of ALD layers: Silicon wafer with 15 nm Al<sub>2</sub>O<sub>3</sub>, 15 nm of TiO<sub>2</sub> and 16 nm of HfO<sub>2</sub> |
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| Double click on the ''Experiment 2.VGX'' file and Avantage should start. If you open from Avantage, remember to select 'All files *.*' to be able to find the *.VGX file.
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| [[File:ALD-Sandwich-01.jpg|700px]]
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| The experiment has three points. Here, we will process the data in the 'Scanned' point. Minimize the other points and open a new processing grid.
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| [[File:ALD-Sandwich-03.jpg|700px]]
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| Click on the point in the experiment tree and drag the content into the processing grid.
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| [[File:ALD-Sandwich-04a.jpg|700px]]
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| This action will create a grid with all spectra. Here, however, we will remove the survey spectrum from the processing grid by deleting it (keep in mind always to separate processing grids for [[Specific Process Knowledge/Characterization/XPS/Processing/Guidelines|survey spectra, scanned and snapshot spectra]]).
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| [[File:ALD-Sandwich-06.jpg|700px]]
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| Rearrange the scanned spectra in the processing grid (Here called 'Data Grid2') with the button highlighted to the right.
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| [[File:ALD-Sandwich-09a.jpg|700px]]
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| Open a new processing grid for the survey spectra, drag the spectra over there and remove the remaining empty grids. Here, the processing grid is called 'Data Grid3'.
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| [[File:ALD-Sandwich-12.jpg|700px]]
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| Now, we have two processing grids ready for analysis.
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