Specific Process Knowledge/Characterization: Difference between revisions
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{| {{table}} | {| {{table}} | ||
| width="50" align="center" style="background:#f0f0f0;"|'''''' | | width="50" align="center" style="background:#f0f0f0;"|'''''' | ||
| width="50" align="center" style="background:#f0f0f0;"|''' | | width="50" align="center" style="background:#f0f0f0;"|'''Micro- scopes''' | ||
| width="50" align="center" style="background:#f0f0f0;"|'''SEM (incl. EDX)''' | | width="50" align="center" style="background:#f0f0f0;"|'''SEM (incl. EDX)''' | ||
| width="50" align="center" style="background:#f0f0f0;"|'''AFM''' | | width="50" align="center" style="background:#f0f0f0;"|'''AFM''' | ||
| width="50" align="center" style="background:#f0f0f0;"|'''Stylus profiler''' | | width="50" align="center" style="background:#f0f0f0;"|'''Stylus profiler''' | ||
| width="50" align="center" style="background:#f0f0f0;"|'''Optical profiler''' | | width="50" align="center" style="background:#f0f0f0;"|'''Optical profiler''' | ||
| width="50" align="center" style="background:#f0f0f0;"|'''Filmtek ( | | width="50" align="center" style="background:#f0f0f0;"|'''Filmtek (reflec- tometer)''' | ||
| width="50" align="center" style="background:#f0f0f0;"|''' | | width="50" align="center" style="background:#f0f0f0;"|'''Ellip- someter''' | ||
| width="50" align="center" style="background:#f0f0f0;"|'''Thickness stylus''' | | width="50" align="center" style="background:#f0f0f0;"|'''Thickness stylus''' | ||
| width="50" align="center" style="background:#f0f0f0;"|'''XPS''' | | width="50" align="center" style="background:#f0f0f0;"|'''XPS''' | ||