Specific Process Knowledge/Etch/KOH Etch/ProcessInfo: Difference between revisions
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== Backside protection == | == Backside protection == | ||
It is possible to protect the backside of the wafer against KOH. | It is possible to protect the backside of the wafer against the KOH etch. | ||
Two different solutions have been used: | Two different solutions have been used: | ||
* Using special wafer holder. [[File:AMMT_PI_WETandem.pdf]] | * Using special wafer holder. [[File:AMMT_PI_WETandem.pdf]] | ||