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It is possible to protect the backside of the wafer against KOH.
It is possible to protect the backside of the wafer against KOH.
Two different solutions has been used:
Two different solutions have been used:
* Using special wafer holder. [[File:AMMT_PI_WETandem.pdf]] [[File:Tandem4.png|200px|thumb]][[File:Tandem4 b.png|200px|thumb]]
* Using special wafer holder. [[File:AMMT_PI_WETandem.pdf]]  
<gallery caption="KOH Backside Protection" widths="200px" heights="200px" perrow="2">
  Image:Tandem4.png|Tandem4 wafer holder.
  Image:Tandem4 b.png|Tandem4 holder with wafer.
</gallery>
* using spin-on film (ProTec B3 from Brewer Science link: [https://www.brewerscience.com/products/protek-b3/ Protek B3])
* using spin-on film (ProTec B3 from Brewer Science link: [https://www.brewerscience.com/products/protek-b3/ Protek B3])


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