Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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*[[Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum|Molybdenum (Mo)]] | *[[Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum|Molybdenum (Mo)]] | ||
*[[Specific Process Knowledge/Thin film deposition/Deposition of Nickel|Nickel (Ni)]] | *[[Specific Process Knowledge/Thin film deposition/Deposition of Nickel|Nickel (Ni)]] | ||
*[[Specific Process Knowledge/Thin film deposition/Deposition of Niobium|Niobium (Nb)]] | |||
*[[Specific Process Knowledge/Thin film deposition/Deposition of Palladium|Palladium (Pd)]] | *[[Specific Process Knowledge/Thin film deposition/Deposition of Palladium|Palladium (Pd)]] | ||
*[[Specific Process Knowledge/Thin film deposition/Deposition of Platinum|Platinum (Pt)]] | *[[Specific Process Knowledge/Thin film deposition/Deposition of Platinum|Platinum (Pt)]] | ||
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*[[Specific Process Knowledge/Thin film deposition/Deposition of Tungsten|Tungsten (W)]] - thinner layers | *[[Specific Process Knowledge/Thin film deposition/Deposition of Tungsten|Tungsten (W)]] - thinner layers | ||
Note that to date (July 2018) we have processes available for deposition of Al, Cr, Au, Ni, Pd, Ag, Ti, and W as well as Ru. More will be available as they are requested | Note that to date (July 2018) we have processes available for deposition of Al, Cr, Au, Ni, Pd, Ag, Ti, and W as well as Ru. More will be available as they are requested. | ||
==Equipment performance and process related parameters for the Temescal E-beam evaporator== | ==Equipment performance and process related parameters for the Temescal E-beam evaporator== | ||