Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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You may get some idea of how much the substrate will be heated by looking at the temperature required to give a reasonable vapor pressure for the evaporation. You can find a collection of Honig's vapor pressure curves at the bottom of [https://old.mcallister.com/vacuum.html this page (external link)]. | You may get some idea of how much the substrate will be heated by looking at the temperature required to give a reasonable vapor pressure for the evaporation. You can find a collection of Honig's vapor pressure curves at the bottom of [https://old.mcallister.com/vacuum.html this page (external link)]. | ||
Please | Please contact us if you would like to test the heating of the substrates (write to thinfilm@danchip.dtu.dk). | ||
==The e-beam and the Cu hearth== | ==The e-beam and the Cu hearth== | ||