Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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== Heating during deposition == | == Heating during the deposition == | ||
If the material you are depositing requires a lot of heat to evaporate, the substrates may get warm during the deposition. | If the material you are depositing requires a lot of heat to evaporate, the substrates may get warm during the deposition. | ||
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Please ask us if you need to test the heating of the substrates before making a deposition with the metal you need (contact thinfilm@danchip.dtu.dk). | Please ask us if you need to test the heating of the substrates before making a deposition with the metal you need (contact thinfilm@danchip.dtu.dk). | ||
==The e-beam and the Cu hearth== | ==The e-beam and the Cu hearth== | ||