Specific Process Knowledge/Characterization: Difference between revisions
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==Overview of characteristics and where to measure it== | ==Overview of characteristics and where to measure it== | ||
{| {{table}} | {| {{table}} | ||
| align="center" style="background:#f0f0f0;"|'''''' | | width="50" align="center" style="background:#f0f0f0;"|'''''' | ||
| align="center" style="background:#f0f0f0;"|'''Microscopes''' | | width="50" align="center" style="background:#f0f0f0;"|'''Microscopes''' | ||
| align="center" style="background:#f0f0f0;"|'''SEM (incl. EDX)''' | | width="50" align="center" style="background:#f0f0f0;"|'''SEM (incl. EDX)''' | ||
| align="center" style="background:#f0f0f0;"|'''AFM''' | | width="50" align="center" style="background:#f0f0f0;"|'''AFM''' | ||
| align="center" style="background:#f0f0f0;"|'''Stylus profiler''' | | width="50" align="center" style="background:#f0f0f0;"|'''Stylus profiler''' | ||
| align="center" style="background:#f0f0f0;"|'''Optical profiler''' | | width="50" align="center" style="background:#f0f0f0;"|'''Optical profiler''' | ||
| align="center" style="background:#f0f0f0;"|'''Filmtek (reflectometer)''' | | width="50" align="center" style="background:#f0f0f0;"|'''Filmtek (reflectometer)''' | ||
| align="center" style="background:#f0f0f0;"|'''Ellipsometer''' | | width="50" align="center" style="background:#f0f0f0;"|'''Ellipsometer''' | ||
| align="center" style="background:#f0f0f0;"|'''Thickness stylus''' | | width="50" align="center" style="background:#f0f0f0;"|'''Thickness stylus''' | ||
| align="center" style="background:#f0f0f0;"|'''XPS''' | | width="50" align="center" style="background:#f0f0f0;"|'''XPS''' | ||
| align="center" style="background:#f0f0f0;"|'''PL mapper''' | | width="50" align="center" style="background:#f0f0f0;"|'''PL mapper''' | ||
| align="center" style="background:#f0f0f0;"|'''4-point probe''' | | width="50" align="center" style="background:#f0f0f0;"|'''4-point probe''' | ||
| align="center" style="background:#f0f0f0;"|'''Probe station''' | | width="50" align="center" style="background:#f0f0f0;"|'''Probe station''' | ||
| align="center" style="background:#f0f0f0;"|'''XRD''' | | width="50" align="center" style="background:#f0f0f0;"|'''XRD''' | ||
| align="center" style="background:#f0f0f0;"|'''Life time scanner''' | | width="50" align="center" style="background:#f0f0f0;"|'''Life time scanner''' | ||
| align="center" style="background:#f0f0f0;"|'''Drop shape analyser''' | | width="50" align="center" style="background:#f0f0f0;"|'''Drop shape analyser''' | ||
| align="center" style="background:#f0f0f0;"|'''Hardness tester''' | | width="50" align="center" style="background:#f0f0f0;"|'''Hardness tester''' | ||
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