Specific Process Knowledge/Characterization: Difference between revisions
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==Overview of characteristics and where to measure it== | ==Overview of characteristics and where to measure it== | ||
{| {{table}} | {| {{table}} | ||
| align="center" style="background:#f0f0f0;"|'''''' | | width="50" align="center" style="background:#f0f0f0;"|'''Micro- scopes'''| width="50" align="center" style="background:#f0f0f0;"|'''SEM (incl. EDX)'''| width="50" align="center" style="background:#f0f0f0;"|'''AFM'''| width="50" align="center" style="background:#f0f0f0;"|'''Stylus profiler'''| width="50" align="center" style="background:#f0f0f0;"|'''Optical profiler'''| width="50" align="center" style="background:#f0f0f0;"|'''Filmtek (reflec- tometer)'''| width="50" align="center" style="background:#f0f0f0;"|'''Ellip- someter'''| width="50" align="center" style="background:#f0f0f0;"|'''Thick- ness stylus'''| width="50" align="center" style="background:#f0f0f0;"|'''XPS'''| width="50" align="center" style="background:#f0f0f0;"|'''PL mapper'''| width="50" align="center" style="background:#f0f0f0;"|'''4-point probe'''| width="50" align="center" style="background:#f0f0f0;"|'''Probe station'''| width="50" align="center" style="background:#f0f0f0;"|'''XRD'''| width="50" align="center" style="background:#f0f0f0;"|'''Life time scanner'''| width="50" align="center" style="background:#f0f0f0;"|'''Drop shape analyser'''| width="50" align="center" style="background:#f0f0f0;"|'''Hard- ness tester''' | ||
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| align="center" style="background:#f0f0f0;"|'''AFM''' | |||
| align="center" style="background:#f0f0f0;"|'''Stylus profiler''' | |||
| align="center" style="background:#f0f0f0;"|'''Optical profiler''' | |||
| align="center" style="background:#f0f0f0;"|'''Filmtek ( | |||
| align="center" style="background:#f0f0f0;"|''' | |||
| align="center" style="background:#f0f0f0;"|''' | |||
| align="center" style="background:#f0f0f0;"|'''XPS''' | |||
| align="center" style="background:#f0f0f0;"|'''PL mapper''' | |||
| align="center" style="background:#f0f0f0;"|'''4-point probe''' | |||
| align="center" style="background:#f0f0f0;"|'''Probe station''' | |||
| align="center" style="background:#f0f0f0;"|'''XRD''' | |||
| align="center" style="background:#f0f0f0;"|'''Life time scanner''' | |||
| align="center" style="background:#f0f0f0;"|'''Drop shape analyser''' | |||
| align="center" style="background:#f0f0f0;"|''' | |||
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