Specific Process Knowledge/Characterization: Difference between revisions
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== Choose equipment == | == Choose equipment == | ||
===AFM=== | |||
*[[/AFM: Atomic Force Microscopy|AFM - ''Atomic Force Microscopy'']] | *[[/AFM: Atomic Force Microscopy|AFM - ''Atomic Force Microscopy'']] | ||
===Element analysis=== | |||
*[[/SIMS: Secondary Ion Mass Spectrometry#Atomika_SIMS|Atomika SIMS]] | *[[/SIMS: Secondary Ion Mass Spectrometry#Atomika_SIMS|Atomika SIMS]] | ||
*[[/XPS#XPS-ThermoScientific|XPS-ThermoScientific ]] | *[[/XPS#XPS-ThermoScientific|XPS-ThermoScientific ]] | ||
===Optical and stylus profilers=== | |||
*[[/Profiler#Optical_Profiler_(Sensofar)|Optical Profiler (Sensofar)]] | *[[/Profiler#Optical_Profiler_(Sensofar)|Optical Profiler (Sensofar)]] | ||
*[[/Profiler#Dektak XTA_new stylus profiler|Dektak XTA_new]] | *[[/Profiler#Dektak XTA_new stylus profiler|Dektak XTA_new]] | ||
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===SEM's at CEN=== | |||
*[[LabAdviser/CEN/Quanta 3D FIB/SEM|FIB-SEM FEI QUANTA 200 3D]] | *[[LabAdviser/CEN/Quanta 3D FIB/SEM|FIB-SEM FEI QUANTA 200 3D]] | ||
*[[LabAdviser/CEN/Helios Nanolab 600|Dual Beam FEI Helios Nanolab 600]] | *[[LabAdviser/CEN/Helios Nanolab 600|Dual Beam FEI Helios Nanolab 600]] | ||
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*[[LabAdviser/CEN/Inspect S|SEM Inspect S]] | *[[LabAdviser/CEN/Inspect S|SEM Inspect S]] | ||
===SEM's at Danchip=== | |||
*[[/SEM: Scanning Electron Microscopy |SEM Comparison page]] | *[[/SEM: Scanning Electron Microscopy |SEM Comparison page]] | ||
*[[/SEM LEO|SEM LEO]] | *[[/SEM LEO|SEM LEO]] | ||
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*[[/SEM Tabletop 1|SEM Tabletop 1]] | *[[/SEM Tabletop 1|SEM Tabletop 1]] | ||
===TEM's at CEN=== | |||
*[[LabAdviser/CEN/Titan ATEM |Titan ATEM]] | *[[LabAdviser/CEN/Titan ATEM |Titan ATEM]] | ||
*[[LabAdviser/CEN/Titan ETEM |Titan ETEM]] | *[[LabAdviser/CEN/Titan ETEM |Titan ETEM]] | ||
*[[LabAdviser/CEN/Tecnai TEM |Tecnai TEM]] | *[[LabAdviser/CEN/Tecnai TEM |Tecnai TEM]] | ||
===Various=== | |||
*[[/Drop Shape Analyzer|Drop Shape Analyzer]] | *[[/Drop Shape Analyzer|Drop Shape Analyzer]] | ||