Jump to content

Specific Process Knowledge/Thin film deposition/thermalevaporator: Difference between revisions

← Older editNewer edit →
VisualWikitext
Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,763 edits
Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,763 edits
Line 54: Line 54:
|style="background:LightGrey; color:black"|Pumpdown time
|style="background:LightGrey; color:black"|Pumpdown time
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*10-15 min to <1x10<sup>-5</sup> Torr
*about 15 min
*20-30 min to <3x10<sup>-6</sup> Torr
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator"