Specific Process Knowledge/Thin film deposition/Temescal/Acceptance Test: Difference between revisions
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Side wall coverage was evaluated in SEM for Ti/Au films deposited at normal incidence (what most users require, which gives no side-wall deposition) and with various degrees of tilt. | Side wall coverage was evaluated in SEM for Ti/Au films deposited at normal incidence (what most users require, which gives no side-wall deposition) and with various degrees of tilt. | ||
===[[ | ===[[Media:Temescal Acceptance Test Results Mar-April-May 2018.pdf|Full acceptance test report here]] === | ||
== Thickness uniformity == | == Thickness uniformity == | ||