Specific Process Knowledge/Thin film deposition/Temescal/Acceptance Test: Difference between revisions
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Side wall coverage was evaluated in SEM for Ti/Au films deposited at normal incidence (what most users require, which gives no side-wall deposition) and with various degrees of tilt. | Side wall coverage was evaluated in SEM for Ti/Au films deposited at normal incidence (what most users require, which gives no side-wall deposition) and with various degrees of tilt. | ||
===[[:File:Temescal Acceptance Test Results Mar-April-May 2018.pdf|'''Full acceptance test report | ===[[:File:Temescal Acceptance Test Results Mar-April-May 2018.pdf|'''Full acceptance test report''']] === | ||
== Thickness uniformity == | == Thickness uniformity == | ||
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The side wall deposition was clearly stronger for 53 ° tilt than for 17 ° tilt. | The side wall deposition was clearly stronger for 53 ° tilt than for 17 ° tilt. | ||
[[File:tilt27_sample1-_01.jpg|400px|thumb|Side wall deposition on sample deposited with 17 ° tilt]] | |||
[[File:tilt53_sample2_01.jpg|400px|thumb|Side wall deposition on sample deposited with 53 ° tilt]] | |||