Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions

Revision as of 15:19, 4 September 2018 view source Reet (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231 1,760 edits →Comments: Adhesion layer ← Older edit		Revision as of 15:20, 4 September 2018 view source Reet (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231 1,760 edits →Titanium deposition Newer edit →
Line 5:		Line 5:
	==Titanium deposition ==		==Titanium deposition ==

	Titanium can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.		Titanium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment.