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Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions

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'''*'''  ''For thicknesses above 600 nm please write to metal@danchip.dtu.dk to ensure that there is enough material available.''
'''*'''  ''For thicknesses above 600 nm please write to metal@danchip.dtu.dk to ensure that there is enough material available.''
== Comments: Choise of equipment ==
'''Thick layers'''
Practical experience has shown that at some occation it is better to use the Wordentec than the Alcatel for thicker Ti layers. Deposition of 5000 Å Ti on Si is working fine in both machines. However, with the same thickness of Ti deposited on pyrex+resist, the metal layer deposited in Alcatel may have metal flakes in the center of the wafer. The process workes without problems in Wordentec.


== Comments: Adhesion layer ==
== Comments: Adhesion layer ==
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