Specific Process Knowledge/Thin film deposition/Deposition of Tantalum: Difference between revisions
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== Tantalum deposition == | |||
Tantalum can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. | Tantalum can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. | ||
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|As of August 2018, | |As of August 2018, Ta has not yet been deposited in the Temescal. | ||
Please contact the Thin Film group to develop a process. | Please contact the Thin Film group to develop a process. | ||
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