Specific Process Knowledge/Thin film deposition/Deposition of Copper: Difference between revisions
Appearance
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! General description | ! General description | ||
|E-beam deposition of Cu | |E-beam deposition of Cu | ||
(line-of-sight deposition) | |||
|Sputter deposition of Cu | |Sputter deposition of Cu | ||
(not line-of-sight deposition) | |||
|- | |- | ||