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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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* PGMEA for spinner bowl cleaning and vapor tip bath
* PGMEA for spinner bowl cleaning and vapor tip bath
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* AR-P 6200.0? (CSAR) for 2", 4", and 6"
* AR-P 6200.09 (CSAR) for 2", 4", and 6"
* AZ5214E for 2", 4", and 6"
* AZ5214E for 2", 4", and 6"
* AZ MiR 701 (29cps) for 4", and 6"
* AZ MiR 701 (29cps) for 4", and 6"
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|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* no manual dispense
* no manual dispense
* syringe dispense (30cc) of PGMEA and anisole-based resist
* syringe dispense (30cc) of PGMEA and anisole-based resist (2" only)
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* yes
* yes
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