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Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions

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=== InP etch with Cl2/CH4/Ar 2013===
=== InP etch with Cl2/CH4/Ar 2013===
Work done by Matthews Haines in 2013
Work done by Matthew Haines in 2013 <br>
 
*[[Media:InP_Etch_Presentation_Final_Version-ky-bghe.pdf|InP Etch Presentation by Matthew Haines]]


=== InP/InGaAsP/InGaAs etch 2011 ===
=== InP/InGaAsP/InGaAs etch 2011 ===
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/III-V_ICP/InP-InGaAsP-InGaAs"