Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic: Difference between revisions
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The bench in gowning contains a sink, an ultrasonics bath and a rinse bath for rinsing samples cleaned in Triton X-100. To clean the samples: | The bench in gowning contains a sink, an ultrasonics bath and a rinse bath for rinsing samples cleaned in Triton X-100. To clean the samples: | ||
*Fill | *Find a suitable holder for your samples in the cupboard below the baths | ||
*Make sure the ultrasonics bath dump valve is closed | |||
*Fill the ultrasonics bath (the one made of metal) with DI water (enough to completely cover your samples) | |||
*Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do '''''NOT''''' use undiluted Triton X-100) | *Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do '''''NOT''''' use undiluted Triton X-100) | ||
*Start ultrasonics | *Start ultrasonics on the front panel | ||
*Leave sample in ultrasonics for 10 min | *Leave sample in ultrasonics for 10 min | ||
*Switch off ultrasonics | *Switch off ultrasonics | ||
*Fill rinse bath with DI water and rinse samples | *Fill rinse bath (the one made in plastic) with DI water and rinse your samples | ||
*Remove samples and dry them | *Remove samples and dry them | ||
*Dump Triton X-100 and | *Dump the Triton X-100 solution and rinse baths to drain. Rinse tanks with DI water. Leave dump valves open so the baths drain completely | ||
*Continue with [http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning/7-up_%26_Piranha piranha]. | *Continue with [http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning/7-up_%26_Piranha piranha]. | ||