Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic: Difference between revisions
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===Procedure=== | ===Procedure=== | ||
Fill up the tank with DI water | *Fill up the tank with DI water | ||
Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do NOT use the undiluted Triton X-100) | *Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do NOT use the undiluted Triton X-100) | ||
Start ultrasonics using the front panel button | *Start ultrasonics using the front panel button | ||
Leave sample in ultrasonics for 10 min | *Leave sample in ultrasonics for 10 min | ||
Switch off ultrasonics | *Switch off ultrasonics | ||
Fill rinse bath with DI water and rinse samples | *Fill rinse bath with DI water and rinse samples | ||
Remove samples and dry them | *Remove samples and dry them | ||
Dump the Triton X-100 and rinse bath to drain. Rinse tanks with DI water. | *Dump the Triton X-100 and rinse bath to drain. Rinse tanks with DI water. | ||
Continue with piranha. | *Continue with piranha. | ||