Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=309] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=309] | ||
It is equipped with 2 high power lasers: | It is equipped with 2 high power lasers : | ||
* a 50W picosecond laser that can emit light at 3 wavelengths: 355nm, 532nm and 1064nm (Time-Bandwidth Products, Fuego/Duetto. See some details in this article: [http://www.time-bandwidth.com/upload/press/weingartenlasertechnikjournalvol6issue3p51.pdf] ) with a pulse repetition rate from 200kHz up to 8000kHz. | * a 50W picosecond laser that can emit light at 3 wavelengths: 355nm, 532nm and 1064nm (Time-Bandwidth Products, Fuego/Duetto. See some details in this article: [http://www.time-bandwidth.com/upload/press/weingartenlasertechnikjournalvol6issue3p51.pdf] ) with a pulse repetition rate from 200kHz up to 8000kHz. | ||