Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 111: | Line 111: | ||
<br/>The flat alignment accuracy has been measured to be 0±0.1° (1.7mRad) quite consistently. Out of a total of 15 exposures, 13 showed misalignment of 0.1° or better, despite initial sample rotations exceeding 5°. | <br/>The flat alignment accuracy has been measured to be 0±0.1° (1.7mRad) quite consistently. Out of a total of 15 exposures, 13 showed misalignment of 0.1° or better, despite initial sample rotations exceeding 5°. | ||
Please observe, that one should not select the flat alignment option if 'Expose Crosses' is used. The design will be rotated, but the crosses will not, resulting in a | Please observe, that one should not select the flat alignment option if 'Expose Crosses' is used. The design will be rotated, but the crosses will not, resulting in a subsequent alignment error equal to the flat angle. | ||
=Alignment= | =Alignment= | ||