Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
| Line 156: | Line 156: | ||
| align="center" style="background:#f0f0f0;"|'''Measured depth [nm]''' | | align="center" style="background:#f0f0f0;"|'''Measured depth [nm]''' | ||
| align="center" style="background:#f0f0f0;"|'''Repeated 20170925 with cover off''' | | align="center" style="background:#f0f0f0;"|'''Repeated 20170925 with cover off''' | ||
| align="center" style="background:#f0f0f0;"|'''Repeated 20180816 after repair''' | |||
|- | |- | ||
| 1||337.5||347.9 | | 1||337.5||347.9|| | ||
|- | |- | ||
| 2||336.5||333.9 | | 2||336.5||333.9|| | ||
|- | |- | ||
| 3||334.7||341.5 | | 3||334.7||341.5|| | ||
|- | |- | ||
| 4||335.5||343.2 | | 4||335.5||343.2|| | ||
|- | |- | ||
| 5||339.2||347.7 | | 5||339.2||347.7|| | ||
|- | |- | ||
| 6||337.2||345.4 | | 6||337.2||345.4|| | ||
|- | |- | ||
| 7||334.2||341.8 | | 7||334.2||341.8|| | ||
|- | |- | ||
| 8||335.5||337.9 | | 8||335.5||337.9|| | ||
|- | |- | ||
| 9||341.1||342.1 | | 9||341.1||342.1|| | ||
|- | |- | ||
| 10||344.4||335.9 | | 10||344.4||335.9|| | ||
|- | |- | ||
|Average depth||337.58||341.73 | |Average depth||337.58||341.73||337.82 | ||
|- | |- | ||
|Repeatability||3.0% (the bad repeatability was accepted due to the high noise level in the room)||4.1% | |Repeatability||3.0% (the bad repeatability was accepted due to the high noise level in the room)||4.1%||3.0% | ||
|} | |} | ||