Specific Process Knowledge/Thin film deposition/Deposition of Gold/Adhesion layers: Difference between revisions

← Older edit Newer edit →

VisualWikitext

Revision as of 12:37, 14 August 2018 view source Mattod (talk \| contribs) DCH-Employees-701 341 edits →Effect on Au film morphology, grain size and texture ← Older edit		Revision as of 12:37, 14 August 2018 view source Mattod (talk \| contribs) DCH-Employees-701 341 edits →Adhesion layer effect on Au thin films Newer edit →
Line 18:		Line 18:
	From the cross section profile of the 2nm Au sample (Fig. 2a), it is clear that Au, when deposited directly on SiO2, in order to reduce the interface energy, forms a nanoparticle-like layer in contrast to a continuous film. The diameter of the nanoparticles is about 10 nm. The nanoparticle morphology is confirmed by AFM analysis (Fig. 2b). The RMS surface roughness was measured to be 2.4 nm. For comparison, the RMS roughness of the SiO2 substrate was 0.3 nm. When the thin-film nominal thickness is increased to 20 nm (20nm Au sample, Fig. 2c), the Au layer becomes continuous, but a certain degree of surface roughness is still present due to grain coalescence. The AFM image (Fig. 2d) shows an RMS surface roughness of 1.0 nm, which is significantly lower than the 2nm Au sample.		From the cross section profile of the 2nm Au sample (Fig. 2a), it is clear that Au, when deposited directly on SiO2, in order to reduce the interface energy, forms a nanoparticle-like layer in contrast to a continuous film. The diameter of the nanoparticles is about 10 nm. The nanoparticle morphology is confirmed by AFM analysis (Fig. 2b). The RMS surface roughness was measured to be 2.4 nm. For comparison, the RMS roughness of the SiO2 substrate was 0.3 nm. When the thin-film nominal thickness is increased to 20 nm (20nm Au sample, Fig. 2c), the Au layer becomes continuous, but a certain degree of surface roughness is still present due to grain coalescence. The AFM image (Fig. 2d) shows an RMS surface roughness of 1.0 nm, which is significantly lower than the 2nm Au sample.

	[[File:Picture1.png\|~~550px~~\|center\|thumb\|Fig. 2: TEM cross section images and 300x300 nm AFM images of the 2nm Au sample (a-b) and of the 20nm Au sample (c-d).]]		[[File:Picture1.png\|300px\|center\|thumb\|Fig. 2: TEM cross section images and 300x300 nm AFM images of the 2nm Au sample (a-b) and of the 20nm Au sample (c-d).]]