Specific Process Knowledge/Characterization/XPS/Processing

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XPS data processing

You will need some kind of dedicated software in order to analyze and interpret XPS spectra. You can find many online but here we will only use the Avantage for obvious reasons. Installing it on your own PC is strongly adviced as the analysis may be time consuming.

Install Avantage

To install Avantage, please download the latest version (currently no. 5.988, a 202 Mb zip file and therefore above the 100 Mb limit of LabAdviser) from the following locations

• The internet
• Cleanroom drive: O:\CleanroomDrive\XPS\5.988\install5988.zip
• University drive: U:\DCH\CleanroomDrive\XPS\5.988\install5988.zip

and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo ( SA-Support.SID.Europe@thermofisher.com or click here) requesting a standard processing license. Usually you will have an answer within a day or two. Use the license to activate Avantage and you are ready to analyze your data.

How to analyze data

In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described.

XPS Knowledge View

A knowledge database providing specific information on every element is included in the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click HERE to get information on how to access XPS Knowledge View in Avantage.

Basic instructions

Click HERE to have a complete walk-through of an example. This includes

• Open data file
• Open and analyze survey spectrum
• Analyze high resolution spectra of the individual spectra:
  • Add background
  • Add peaks
  • Quantify
• Analyze depth profiles

Examples of data analysis

• Depth profile of a silicon wafer with nitride, polysilicon and oxide layer

Periodic table with binding energies of all elements

• Specific Process Knowledge/Characterization/XPS/Processing/PeriodicTable