Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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Looking to expand our dry etching capabilities in 2017 we got an irresistible offer on a twin Pegasus system with cassette to cassette vacuum robot from a commerciel fab. The twin Pegasus system (will be called Pegasus 3 and 4) will be installed at the old cluster 2 location in cleanroom C1 from August 2018 onwards. We intend to use one chamber as 6" silicon etch work horse and the other to be converted (adding extra process gases) into a 6" dielectric etch tool that will supplement/replace the AOE. | Looking to expand our dry etching capabilities in 2017 we got an irresistible offer on a twin Pegasus system with cassette to cassette vacuum robot from a commerciel fab. The twin Pegasus system (will be called Pegasus 3 and 4) will be installed at the old cluster 2 location in cleanroom C1 from August 2018 onwards. We intend to use one chamber as 6" silicon etch work horse and the other to be converted (adding extra process gases) into a 6" dielectric etch tool that will supplement/replace the AOE. | ||
This page was originally intended as a regular one-machine page (the Pegasus page). However, as of 2018 with several tools, the page will serve as common page for all of our Pegasi - with subpages for each tool. | |||
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