Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus/Parameters: Difference between revisions

← Older editNewer edit →
VisualWikitext
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
No edit summary
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
No edit summary
Line 1: Line 1:


<!-- revised 1/6-2015 by jmli -->
<!--Checked for updates on 30/7-2018 - ok/jmli -->
= A short description of the hardware on the Pegasus and the other dry etchers =
= A short description of the hardware on the Pegasus and the other dry etchers =


Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Parameters"